| 1. Continuous High-Throughput Processing | The inline configuration with automatic loading and unloading ensures smooth material flow, reduced manual handling, and optimized production efficiency. |
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| 2. Flexible Product Compatibility | Customizable dimensions (50–100 mm width and 150–280 mm length) allow the system to adapt to various component sizes and evolving production requirements. |
| 3. Adjustable and Precise Plasma Control | With adjustable plasma power up to 1000W and standard 2 MFCs (Ar and O₂), expandable to 3 MFCs, the system enables accurate process tuning and consistent surface treatment results. |
| 4. Reliable Industrial Automation | The Siemens PLC control system provides stable operation, recipe management, process repeatability, and easy integration into existing automated manufacturing lines. |
The Inline Vacuum Plasma Treatment System VLOL-12-A is engineered for continuous, high-efficiency surface processing within automated production lines. It accommodates customizable product dimensions from 50–100 mm in width and 150–280 mm in length, providing flexibility for a wide range of components. Featuring adjustable plasma power up to 1000W, the system allows precise optimization of cleaning, activation, and coating processes according to material and throughput requirements. Automatic loading and unloading ensure smooth material flow, reduced manual handling, and consistent cycle times. Controlled by a Siemens PLC and equipped with standard 2 MFCs (Ar and O₂), expandable to 3 MFCs, the system delivers accurate gas management and reliable, repeatable inline operation.
| Plasma Main Unit | Dimension (L*W*H) | 1350*1600*2300mm |
| Chamber (L*W*H) (customizable) | 370*330*110mm | |
| Applicable Product Size (L*W) | 150-280*50-100mm | |
| Plasma Power Supply | Plasma Power Supply | 13.56MHz |
| Power Rating | 0-300W / 0-1000W | |
| Control System | Control Method (PLC) | MCGS – TPC1061TI + HMI (opt.) Siemens – S7-200 Smart ST30 |
| Display | 10″ Touch Screen | |
| Vacuum System | Chamber Material | Aluminum |
| Chamber Leak Rate | > 15Pa/s | |
| Ultimate Vacuum | < 5Pa/s | |
| Process Layers (customizable) | 1 pcs | |
| Venting Time | ≤ 15s | |
| Pump Down Time | ≤ 20s | |
| Vacuum Pump | 60m³/h | |
| Pump Type | Oil-Sealed Pump or Dry Pump (opt.) | |
| Gas System | Process Gas Flow Range | 0-300SCCM |
| Process Gas Lines | Standard (Ar/O₂) with 2 MFCs Optional (N₂/H₂/He) with 3 MFCs | |
| Facility Requirements | Equipment Power Supply | 380V 50Hz, 5-Wire |
| Equipment Gas Source (Air Supply) | ≥ 0.4MPa | |
| Equipment Power | 4kW | |
| Operating Environment | 0°C – 50°C |
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