| 1. High-Volume Industrial Processing | The large 800-liter chamber combined with 6 customizable working trays enables eXicient treatment of bulky components or high-batch quantities, significantly increasing production throughput. |
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| 2. Powerful and Stable Plasma Output | With 6kW plasma power, the system delivers strong, uniform plasma density, ensuring deep surface activation and consistent treatment quality even under heavy loading conditions. |
| 3. Optimized Vacuum and Thermal Stability | The 1200 m³/h vacuum pump ensures fast pump-down times and stable vacuum levels, while the 1375 kcal/h chiller maintains eXective cooling for continuous and reliable long-term operation. |
| 4. Flexible and Intelligent Process Control | The Siemens PLC system, together with standard 2 MFCs (Ar and O₂) and optional expansion to 3 MFCs, provides precise gas flow control, repeatable recipes, and seamless integration into automated production environments. |
The 800-Liter Vacuum Plasma Treatment System VL-800-A is a high-capacity industrial solution engineered for large-scale surface cleaning, activation, and coating applications. Powered by a robust 6kW plasma generator, it delivers strong and uniform plasma distribution to ensure consistent treatment results across heavy or high-volume batches. The system is controlled by a reliable Siemens PLC platform for precise parameter management, recipe storage, and seamless automation integration. It comes standard with 2 MFCs (Ar and O₂), expandable to 3 MFCs for advanced gas process flexibility, along with 6 customizable working trays to accommodate various component sizes. Equipped with a 1200 m³/h vacuum pump and a chiller with 1375 kcal/h cooling capacity, the system ensures stable vacuum performance and efficient thermal management during continuous operation.
| Plasma Main Unit Pump/ Chiller | Dimension (L*W*H) | 1780*1740*1900mm |
| Chamber (L*W*H) (customizable) | 890*900*1020mm | |
| Pump (L*W*H) | 1174*554*910mm | |
| Chiller (L*W*H) | 1150*600*1250mm | |
| Plasma Power Supply | Plasma Power Supply | 13.56MHz / 40kHz (opt.) |
| Power Rating | 6KW | |
| Control System | Control Method (PLC) | Siemens – SIMATIC HMI Smart 1000 IE V5 |
| Display | 10″ Touch Screen | |
| Vacuum System | Chamber Material | Aluminum Alloy |
| Chamber Leak Rate | > 10Pa/s | |
| Ultimate Vacuum | < 1Pa/s | |
| Process Layers (customizable) | 6 pcs (Electrode Trays) | |
| Venting Time | ≤ 40s | |
| Pump Down Time | ≤ 70s | |
| Vacuum Pump | 1200m³/h | |
| Pump Type | Oil-Sealed Pump or Dry Pump (opt.) | |
| Chiller System | Cooling Capacity | 1375kcal/h |
| Supply Temperature | 20°C – 25°C | |
| Flow Rate | 3.2m³/h | |
| Gas System | Process Gas Flow Range | 0-3000SCCM |
| Process Gas Lines | Standard (Ar/O₂) with 2 MFCs Optional (N₂/H₂/He) with 3 MFCs | |
| Facility Requirements | Equipment Power Supply | 380V 50Hz, 5-Wire |
| Equipment Gas Source (Air Supply) | ≥ 0.4MPa | |
| Equipment Power | 20kW | |
| Operating Environment | 0°C – 50°C |
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