| 1. High Throughput Capability | The 100-liter chamber combined with 6 standard working trays enables eUicient batch processing and improved productivity for medium to large production volumes. |
|---|---|
| 2. Powerful and Uniform Plasma Performance | The 1000W plasma generator ensures stable discharge and consistent surface treatment results, even for complex geometries and densely loaded trays. |
| 3. Flexible Gas Process Control | Standard 2 MFCs (Ar and O₂) with optional expansion to 3 MFCs allow precise gas mixing and advanced process customization for diverse material applications. |
| 4. Reliable Industrial Automation | The Siemens PLC system provides accurate parameter control, recipe storage, process traceability, and easy integration into automated manufacturing lines. |
The 100-Liter Vacuum Plasma Treatment System VL-100-A is designed for high-efficiency surface cleaning, activation, and functional coating processes in both R&D and industrial production environments. Equipped with a powerful 1000W plasma generator, it delivers stable and uniform plasma distribution for consistent treatment results across larger batches. The Siemens PLC control system ensures precise parameter management, recipe storage, and reliable process repeatability. Standard configuration includes 2 MFCs (Ar and O₂), expandable to 3 MFCs for flexible gas combinations, along with 6 standard working trays that can be customized to accommodate various part sizes and production requirements.
| Plasma Main Unit | Dimension (L*W*H) | 930*765*1750mm |
| Chamber (L*W*H) (customizable) | 515*400*510mm | |
| Plasma Power Supply | Plasma Power Supply | 13.56MHz / 40kHz (opt.) |
| Power Rating | 1000W | |
| Control System | Control Method (PLC) | Siemens – SIMATIC HMI Smart 700 IE V5 |
| Display | 7″ Touch Screen | |
| Vacuum System | Chamber Material | Aluminum Alloy |
| Chamber Leak Rate | > 15Pa/s | |
| Ultimate Vacuum | < 5Pa/s | |
| Process Layers (customizable) | 6 pcs (Wire Mesh) | |
| Venting Time | ≤ 10s | |
| Pump Down Time | ≤ 80s | |
| Vacuum Pump | 60m³/h | |
| Pump Type | Oil-Sealed Pump or Dry Pump (opt.) | |
| Gas System | Process Gas Flow Range | 0-300SCCM |
| Process Gas Lines | Standard (Ar/O₂) with 2 MFCs Optional (N₂/H₂/He) with 3 MFCs | |
| Facility Requirements | Equipment Power Supply | 380V 50Hz, 5-Wire |
| Equipment Gas Source (Air Supply) | ≥ 0.4MPa | |
| Equipment Power | 4.5kW | |
| Operating Environment | 0°C – 50°C |
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