| 1. High Process Efficiency | The 1000W plasma power ensures strong, stable plasma generation for fast surface activation, cleaning, and coating, reducing cycle times while maintaining consistent results. |
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| 2. Precise Gas Control | Equipped with standard 2 MFCs (Ar and O₂) and optional customization up to 3 MFCs, the system enables accurate gas mixing and process optimization for diverse material requirements. |
| 3. Reliable and Intelligent Control | The Siemens PLC system provides stable operation, precise parameter control, recipe storage, and easy integration into automated production lines. |
| 4. Compact Yet Versatile Chamber Size | The 80-liter vacuum chamber offers an ideal balance between capacity and footprint, making it suitable for R&D, small-batch production, and medium-scale industrial applications. |
The 80-Liter Vacuum Plasma Treatment System VL-80-A is a compact and efficient solution designed for precise surface activation, cleaning, and functional coating processes. Equipped with a powerful 1000W plasma generator, it ensures stable plasma discharge and uniform treatment results across a wide range of materials. The system is controlled by a reliable Siemens PLC for intuitive operation, process stability, and easy parameter management. Standard configuration includes two mass flow controllers (Ar and O₂), with the option to customize up to three MFCs for greater process flexibility and advanced gas mixture applications.
| Plasma Main Unit | Dimension (L*W*H) | 930*765*1750mm |
| Chamber (L*W*H) (customizable) | 515*400*410mm | |
| Plasma Power Supply | Plasma Power Supply | 13.56MHz / 40kHz (opt.) |
| Power Rating | 1000W | |
| Control System | Control Method (PLC) | Siemens – SIMATIC HMI Smart 700 IE V5 |
| Display | 7″ Touch Screen | |
| Vacuum System | Chamber Material | Aluminum Alloy |
| Chamber Leak Rate | > 15Pa/s | |
| Ultimate Vacuum | < 5Pa/s | |
| Process Layers (customizable) | 6 pcs (Wire Mesh) | |
| Venting Time | ≤ 10s | |
| Pump Down Time | ≤ 60s | |
| Vacuum Pump | 60m³/h | |
| Pump Type | Oil-Sealed Pump or Dry Pump (opt.) | |
| Gas System | Process Gas Flow Range | 0-300SCCM |
| Process Gas Lines | Standard (Ar/O₂) with 2 MFCs Optional (N₂/H₂/He) with 3 MFCs | |
| Facility Requirements | Equipment Power Supply | 380V 50Hz, 5-Wire |
| Equipment Gas Source (Air Supply) | ≥ 0.4MPa | |
| Equipment Power | 4.5kW | |
| Operating Environment | 0°C – 50°C |
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