| 1. High Power in a Compact Design | The 1000W plasma generator delivers strong and stable plasma performance, enabling effective surface activation and cleaning within a small bench-top footprint. |
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| 2. Uniform Plasma Distribution | The cylindrical chamber design promotes even plasma density, ensuring consistent treatment results across the entire working area. |
| 3. Reliable and Intuitive Control System | The MCGS display with Siemens technology provides precise parameter adjustment, recipe storage, and user-friendly operation for repeatable processing. |
| 4. Flexible Process Capability | Equipped with standard 2 MFCs (Ar and O₂) and a customizable working tray, the system allows accurate gas control and adaptable fixture configuration for various component types. |
The bench-top 5-Liter Vacuum Plasma Treatment System VL-5-A features a cylindrical chamber design optimized for uniform plasma distribution and efficient small-batch processing. Equipped with a powerful 1000W plasma generator, it delivers strong and stable surface activation, cleaning, and coating performance despite its compact footprint. The system integrates an MCGS display based on Siemens technology, providing intuitive operation, precise parameter control, and reliable process management. Standard configuration includes 2 MFCs (Ar and O₂) for accurate gas flow regulation and one customizable working tray to accommodate various component sizes and applications.
| Plasma Main Unit | Dimension (L*W*H) | 600*540*480mm |
| Chamber Cylindrical (L*ø) (customizable) | 280*150mm | |
| Weight w/o Pump | 60 kg | |
| Plasma Power Supply | Plasma Power Supply | 40kHz |
| Power Rating | 1000W | |
| Control System | Control Method (PLC) | MCGS – TPC4013EI |
| Display | 4.3″ Touch Screen | |
| Display Chamber Pressure | LED | |
| Vacuum System | Chamber Material | Stainless Steel |
| Chamber Leak Rate | > 15Pa/s | |
| Ultimate Vacuum | < 5Pa/s | |
| Process Layers (customizable) | 1 pcs (Wire Mesh) | |
| Venting Time | ≤ 15s | |
| Pump Down Time | ≤ 60s | |
| Vacuum Pump | 8m³/h | |
| Pump Type | Oil-Sealed Pump or Dry Pump (opt.) | |
| Gas System | Process Gas Flow Range | 0-200SCCM |
| Process Gas Lines | 2 Channel Flow Meters | |
| Facility Requirements | Equipment Power Supply | AC220 ( ±10%) |
| Equipment Gas Source (Air Supply) | ≥ 0.4MPa | |
| Equipment Power | 2.6kW | |
| Operating Environment | 0°C – 50°C |
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