{"id":7709,"date":"2026-02-06T09:00:00","date_gmt":"2026-02-06T09:00:00","guid":{"rendered":"https:\/\/www.keylinktech.com\/?p=7709"},"modified":"2026-03-02T08:07:27","modified_gmt":"2026-03-02T08:07:27","slug":"how-does-plasma-cleaning-improve-the-reliability-of-semiconductor-devices","status":"publish","type":"post","link":"https:\/\/www.keylinktech.com\/vi\/plasma-surface-technology\/application\/how-does-plasma-cleaning-improve-the-reliability-of-semiconductor-devices\/","title":{"rendered":"L\u00e0m s\u1ea1ch b\u1ec1 m\u1eb7t b\u1eb1ng plasma cho c\u00e1c thi\u1ebft b\u1ecb GaN v\u00e0 Ga\u2082O\u2083: N\u00e2ng cao \u0111\u1ed9 tin c\u1eady ti\u1ebfp x\u00fac v\u00e0 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t."},"content":{"rendered":"<p class=\"wp-block-paragraph\">L\u00e0m s\u1ea1ch b\u1ec1 m\u1eb7t b\u00e1n d\u1eabn b\u1eb1ng plasma gi\u00fap lo\u1ea1i b\u1ecf oxit t\u1ef1 nhi\u00ean, t\u1ea1p ch\u1ea5t carbon v\u00e0 c\u00e1c li\u00ean k\u1ebft kh\u00f4ng b\u00e3o h\u00f2a kh\u1ecfi GaN v\u00e0 Ga\u2082O\u2083 \u1edf nhi\u1ec7t \u0111\u1ed9 th\u1ea5p, c\u1ea3i thi\u1ec7n \u0111i\u1ec7n tr\u1edf ti\u1ebfp x\u00fac ohmic v\u00e0 \u0111\u1ed9 tin c\u1eady c\u1ee7a thi\u1ebft b\u1ecb m\u00e0 kh\u00f4ng g\u00e2y ra h\u01b0 h\u1ea1i do nhi\u1ec7t nh\u01b0 c\u00e1c quy tr\u00ecnh truy\u1ec1n th\u1ed1ng.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>V\u00ec sao kh\u00e2u chu\u1ea9n b\u1ecb b\u1ec1 m\u1eb7t l\u1ea1i l\u00e0 n\u00fat th\u1eaft c\u1ed5 chai m\u00e0 \u00edt ai nh\u1eafc \u0111\u1ebfn<\/strong><\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">GaN v\u00e0 Ga\u2082O\u2083 nh\u1eadn \u0111\u01b0\u1ee3c r\u1ea5t nhi\u1ec1u s\u1ef1 ch\u00fa \u00fd v\u00ec nh\u1eefng l\u00fd do ch\u00ednh \u0111\u00e1ng. Kho\u1ea3ng n\u0103ng l\u01b0\u1ee3ng 3,4 eV c\u1ee7a GaN v\u00e0 d\u1ea3i n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng h\u01a1n t\u1eeb 4,5 \u0111\u1ebfn 5,3 eV c\u1ee7a Ga\u2082O\u2083 \u0111\u1eb7t ch\u00fang v\u00e0o m\u1ed9t \u0111\u1eb3ng c\u1ea5p kh\u00e1c so v\u1edbi silicon trong c\u00e1c \u1ee9ng d\u1ee5ng c\u00f4ng su\u1ea5t cao v\u00e0 t\u1ea7n s\u1ed1 cao.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u0110i\u1ec7n \u00e1p \u0111\u00e1nh th\u1ee7ng cao h\u01a1n, \u0111i\u1ec7n tr\u1edf b\u1eadt th\u1ea5p h\u01a1n, hi\u1ec7u su\u1ea5t t\u1ed1t h\u01a1n \u1edf nhi\u1ec7t \u0111\u1ed9 cao \u2014 hi\u1ec7u n\u0103ng \u0111\u00e3 \u0111\u01b0\u1ee3c ch\u1ee9ng minh r\u00f5 r\u00e0ng.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u0110i\u1ec1u \u00edt \u0111\u01b0\u1ee3c ch\u00fa \u00fd h\u01a1n l\u00e0 nh\u1eefng g\u00ec x\u1ea3y ra tr\u00ean b\u1ec1 m\u1eb7t trong qu\u00e1 tr\u00ecnh ch\u1ebf t\u1ea1o. S\u1ef1 ph\u00e1t tri\u1ec3n m\u00e0ng m\u1ecfng v\u00e0 qu\u00e1 tr\u00ecnh x\u1eed l\u00fd thi\u1ebft b\u1ecb \u0111\u1ec3 l\u1ea1i c\u00e1c oxit t\u1ef1 nhi\u00ean, c\u1eb7n carbon v\u00e0 t\u1ea1p ch\u1ea5t oxy ngay t\u1ea1i giao di\u1ec7n n\u01a1i kim lo\u1ea1i ti\u1ebfp x\u00fac v\u1edbi ch\u1ea5t b\u00e1n d\u1eabn.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Ch\u00fang l\u00e0m ph\u00e2n t\u00e1n c\u00e1c h\u1ea1t t\u1ea3i \u0111i\u1ec7n, t\u0103ng \u0111i\u1ec7n tr\u1edf ti\u1ebfp x\u00fac v\u00e0 \u0111\u1ea9y chi\u1ec1u cao r\u00e0o c\u1ea3n Schottky l\u00ean theo nh\u1eefng c\u00e1ch l\u00e0m h\u1ea1n ch\u1ebf hi\u1ec7u su\u1ea5t c\u1ee7a thi\u1ebft b\u1ecb b\u1ea5t k\u1ec3 v\u1eadt li\u1ec7u ch\u00ednh t\u1ed1t \u0111\u1ebfn \u0111\u00e2u.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Ph\u01b0\u01a1ng ph\u00e1p l\u00e0m s\u1ea1ch b\u1eb1ng h\u00f3a ch\u1ea5t \u01b0\u1edbt x\u1eed l\u00fd c\u00e1c ch\u1ea5t b\u1ea9n d\u1ec5 th\u1ea5y nh\u01b0ng v\u1eabn \u0111\u1ec3 l\u1ea1i c\u00e1c tr\u1ea1ng th\u00e1i b\u1ec1 m\u1eb7t v\u00e0 c\u00e1c li\u00ean k\u1ebft kh\u00f4ng b\u00e3o h\u00f2a. Nh\u1eefng \u0111i\u1ec1u n\u00e0y th\u1ec3 hi\u1ec7n \u1edf vi\u1ec7c thi\u1ebft b\u1ecb ho\u1ea1t \u0111\u1ed9ng k\u00e9m hi\u1ec7u qu\u1ea3 so v\u1edbi th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt v\u00e0 xu\u1ed1ng c\u1ea5p nhanh h\u01a1n so v\u1edbi b\u00ecnh th\u01b0\u1eddng.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>Tia plasma t\u1ea7n s\u1ed1 v\u00f4 tuy\u1ebfn 13,56MHz th\u1ef1c s\u1ef1 t\u00e1c \u0111\u1ed9ng l\u00ean b\u1ec1 m\u1eb7t nh\u01b0 th\u1ebf n\u00e0o?<\/strong><\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">H\u1ec7 th\u1ed1ng ch\u00e2n kh\u00f4ng t\u1ea7n s\u1ed1 v\u00f4 tuy\u1ebfn \u1edf m\u1ee9c 13,56 MHz t\u1ea1o ra plasma, n\u01a1i m\u1eadt \u0111\u1ed9 ion v\u00e0 n\u0103ng l\u01b0\u1ee3ng ion c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c \u0111i\u1ec1u ch\u1ec9nh \u0111\u1ed9c l\u1eadp. Kh\u1ea3 n\u0103ng \u0111i\u1ec1u khi\u1ec3n \u0111\u1ed9c l\u1eadp \u0111\u00f3 l\u00e0 \u0111i\u1ec1u quan tr\u1ecdng. B\u1ea1n c\u00f3 th\u1ec3 \u0111i\u1ec1u ch\u1ec9nh \u0111\u1ee7 n\u0103ng l\u01b0\u1ee3ng \u0111\u1ec3 ph\u00e1 v\u1ee1 c\u00e1c li\u00ean k\u1ebft ch\u1ea5t g\u00e2y \u00f4 nhi\u1ec5m v\u00e0 l\u00e0m d\u1ecbch chuy\u1ec3n c\u00e1c h\u1ea1t tr\u00ean b\u1ec1 m\u1eb7t m\u00e0 kh\u00f4ng t\u00e1c \u0111\u1ed9ng qu\u00e1 s\u00e2u v\u00e0o c\u1ea5u tr\u00fac m\u1ea1ng tinh th\u1ec3 g\u00e2y ra h\u01b0 h\u1ea1i.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Hai \u0111i\u1ec1u x\u1ea3y ra \u0111\u1ed3ng th\u1eddi tr\u00ean b\u1ec1 m\u1eb7t:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>Ph\u1ea3n \u1ee9ng h\u00f3a h\u1ecdc: <\/strong>C\u00e1c g\u1ed1c t\u1ef1 do t\u1ea5n c\u00f4ng tr\u1ef1c ti\u1ebfp c\u00e1c li\u00ean k\u1ebft ch\u1ea5t g\u00e2y \u00f4 nhi\u1ec5m, chuy\u1ec3n h\u00f3a ch\u00fang th\u00e0nh c\u00e1c s\u1ea3n ph\u1ea9m ph\u1ee5 d\u1ec5 bay h\u01a1i \u0111\u01b0\u1ee3c th\u1ea3i ra kh\u1ecfi bu\u1ed3ng.<\/li>\n\n\n\n<li><strong>Phun ph\u1ee7 v\u1eadt l\u00fd: <\/strong>Ph\u01b0\u01a1ng ph\u00e1p b\u1eafn ph\u00e1 ion gi\u00fap lo\u1ea1i b\u1ecf nh\u1eefng v\u1ebft b\u1ea9n m\u00e0 ph\u01b0\u01a1ng ph\u00e1p h\u00f3a h\u1ecdc b\u1ecf s\u00f3t, bao g\u1ed3m c\u1ea3 nh\u1eefng v\u1ebft b\u1ea9n b\u00ean trong c\u00e1c chi ti\u1ebft c\u00f3 t\u1ef7 l\u1ec7 chi\u1ec1u cao\/chi\u1ec1u r\u1ed9ng l\u1edbn m\u00e0 ph\u01b0\u01a1ng ph\u00e1p l\u00e0m s\u1ea1ch \u01b0\u1edbt kh\u00f4ng th\u1ec3 ti\u1ebfp c\u1eadn.<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u0110\u1ed1i v\u1edbi vi\u1ec7c l\u00e0m s\u1ea1ch GaN, plasma g\u1ed1c nit\u01a1 ho\u1eb7c Ar\/H\u2082 lo\u1ea1i b\u1ecf oxit gali t\u1ef1 nhi\u00ean v\u00e0 t\u1ea1p ch\u1ea5t cacbon \u1edf nhi\u1ec7t \u0111\u1ed9 th\u1ea5p h\u01a1n nhi\u1ec1u so v\u1edbi y\u00eau c\u1ea7u c\u1ee7a c\u00e1c ph\u01b0\u01a1ng ph\u00e1p nhi\u1ec7t. GaN kh\u00f4ng ch\u1ecbu \u0111\u01b0\u1ee3c nhi\u1ec7t \u0111\u1ed9 cao, v\u00ec v\u1eady \u0111i\u1ec1u n\u00e0y quan tr\u1ecdng h\u01a1n nhi\u1ec1u so v\u1edbi t\u01b0\u1edfng t\u01b0\u1ee3ng.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u0110\u1ed1i v\u1edbi ph\u01b0\u01a1ng ph\u00e1p x\u1eed l\u00fd plasma oxit gali, plasma argon c\u00f4ng su\u1ea5t th\u1ea5p t\u1ea1o ra c\u00e1c l\u1ed7 tr\u1ed1ng oxy \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t tr\u00ean b\u1ec1 m\u1eb7t Ga\u2082O\u2083. Nh\u1eefng l\u1ed7 tr\u1ed1ng n\u00e0y c\u1ea3i thi\u1ec7n kh\u1ea3 n\u0103ng d\u1eabn \u0111i\u1ec7n v\u00e0 mang l\u1ea1i hi\u1ec7u qu\u1ea3 cao h\u01a1n. <a href=\"https:\/\/www.keylinktech.com\/vi\/application-solutions\/wettability-improvement-2\/\" target=\"_blank\" rel=\"noreferrer noopener\">\u0111i\u1ec7n tr\u1edf ti\u1ebfp x\u00fac<\/a> xu\u1ed1ng.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">H\u1ec7 th\u1ed1ng plasma ch\u00e2n kh\u00f4ng VL-10-A c\u1ee7a Keylink ho\u1ea1t \u0111\u1ed9ng \u1edf t\u1ea7n s\u1ed1 RF 13,56MHz v\u1edbi \u00e1p su\u1ea5t ch\u00e2n kh\u00f4ng t\u1eeb 10 \u0111\u1ebfn 100 Pa, h\u1ed7 tr\u1ee3 c\u00e1c kh\u00ed O\u2082, Ar, H\u2082, N\u2082, CF\u2084 v\u00e0 c\u00e1c kh\u00ed x\u1eed l\u00fd kh\u00e1c. N\u1ec1n t\u1ea3ng n\u00e0y c\u00f3 th\u1ec3 x\u1eed l\u00fd c\u1ea3 qu\u00e1 tr\u00ecnh \u0111i\u1ec1u ch\u1ebf GaN v\u00e0 Ga\u2082O\u2083 m\u00e0 kh\u00f4ng c\u1ea7n c\u1ea5u h\u00ecnh l\u1ea1i ph\u1ea7n c\u1ee9ng. <a href=\"https:\/\/www.keylinktech.com\/vi\/plasma-surface-treatment-systems\/product-introduction\/plasma-surface-treatment-machine\/\" target=\"_blank\" rel=\"noreferrer noopener\">D\u00f2ng s\u1ea3n ph\u1ea9m h\u1ec7 th\u1ed1ng plasma ch\u00e2n kh\u00f4ng \u0111\u1ea7y \u0111\u1ee7<\/a> Bao g\u1ed3m c\u00e1c c\u1ea5u h\u00ecnh b\u1ed5 sung cho c\u00e1c y\u00eau c\u1ea7u s\u1ea3n xu\u1ea5t kh\u00e1c nhau.<\/p>\n\n\n\n<style>\n  .product-card {\n    display: flex;\n    align-items: center;\n    justify-content: center;\n    height: 400px;\n    border: 1px solid #ddd;\n    border-radius: 10px;\n    overflow: hidden;\n    box-shadow: 0 4px 10px rgb(0 0 0 \/ 0.1);\n    max-width: 900px;\n    margin: 0 auto;\n    gap: 40px;\n    padding: 20px;\n    box-sizing: border-box;\n  }\n\n  .product-left,\n  .product-right {\n    flex: 1 1 50%;\n    display: flex;\n    flex-direction: column;\n    justify-content: center;\n    align-items: center;\n    text-align: center;\n  }\n\n  .product-left {\n    gap: 20px;\n  }\n\n  .product-title {\n    font-size: 26px;\n    font-weight: 700;\n    color: #158462;\n    margin: 0;\n  }\n\n  .product-button {\n    background-color: transparent;\n    color: #158462;\n    border: 2px solid #158462;\n    padding: 12px 24px;\n    font-size: 15px;\n    border-radius: 6px;\n    cursor: pointer;\n    transition: transform 0.3s ease;\n    text-decoration: none;\n    display: inline-block;\n  }\n\n  .product-button:hover {\n    transform: scale(1.1);\n  }\n\n  .product-right img {\n    max-width: 100%;\n    max-height: 360px;\n    object-fit: contain;\n    border-radius: 10px;\n  }\n\n  @media (max-width: 768px) {\n    .product-card {\n      flex-direction: column;\n      height: auto;\n      padding: 15px;\n      gap: 15px;\n    }\n\n    .product-left,\n    .product-right {\n      flex: none;\n      width: 100%;\n      text-align: center;\n    }\n\n    .product-right img {\n      max-height: 300px;\n      margin-bottom: 15px;\n    }\n\n    .product-left {\n      order: 2;\n      gap: 10px;\n      align-items: center;\n    }\n\n    .product-right {\n      order: 1;\n    }\n  }\n<\/style>\n\n<div class=\"product-card\">\n  <div class=\"product-right\">\n    <img decoding=\"async\" src=\"https:\/\/www.keylinktech.com\/wp-content\/uploads\/2025\/08\/VL-10-A-Vacuum-Plasma-Treatment-System-1.webp\" alt=\"VL-10-A\" \/>\n  <\/div>\n  <div class=\"product-left\">\n    <span class=\"product-title\"><strong>H\u1ec7 th\u1ed1ng x\u1eed l\u00fd Plasma ch\u00e2n kh\u00f4ng VL-10-A<\/strong><\/span>\n    <a href=\"https:\/\/www.keylinktech.com\/vi\/product\/vl-10-a-vaccuum-plasma-surface-treatment-system\/\" target=\"_blank\" class=\"product-button\">Chi ti\u1ebft th\u00eam<\/a>\n  <\/div>\n<\/div>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>V\u1ea5n \u0111\u1ec1 v\u1edbi qu\u00e1 tr\u00ecnh x\u1eed l\u00fd nhi\u1ec7t \u0111\u1ed1i v\u1edbi c\u00e1c v\u1eadt li\u1ec7u n\u00e0y<\/strong><\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Qu\u00e1 tr\u00ecnh \u1ee7 nhi\u1ec7t ho\u1ea1t \u0111\u1ed9ng kh\u00e1 t\u1ed1t \u0111\u1ed1i v\u1edbi silicon. Nh\u01b0ng \u0111\u1ed1i v\u1edbi GaN v\u00e0 Ga\u2082O\u2083, n\u00f3 l\u1ea1i t\u1ea1o ra nhi\u1ec1u v\u1ea5n \u0111\u1ec1 h\u01a1n l\u00e0 gi\u1ea3i quy\u1ebft \u0111\u01b0\u1ee3c.<\/p>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-8f761849 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:66.66%\">\n<p class=\"wp-block-paragraph\">Vi\u1ec7c lo\u1ea1i b\u1ecf c\u00e1c oxit t\u1ef1 nhi\u00ean kh\u1ecfi GaN b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p nhi\u1ec7t \u0111\u00f2i h\u1ecfi nhi\u1ec7t \u0111\u1ed9 tr\u00ean 850\u00b0C, v\u01b0\u1ee3t qu\u00e1 \u0111i\u1ec3m m\u00e0 GaN b\u1eaft \u0111\u1ea7u ph\u00e2n h\u1ee7y. Qu\u00e1 tr\u00ecnh \u1ee7 nhi\u1ec7t nhanh t\u1ea1o ra \u1ee9ng su\u1ea5t l\u00e0m m\u1edd c\u00e1c giao di\u1ec7n c\u1ea5u tr\u00fac d\u1ecb th\u1ec3, v\u1ed1n l\u00e0 y\u1ebfu t\u1ed1 l\u00e0m cho c\u00e1c thi\u1ebft b\u1ecb n\u00e0y ho\u1ea1t \u0111\u1ed9ng hi\u1ec7u qu\u1ea3. C\u00e1c ch\u1ea5t pha t\u1ea1p khu\u1ebfch t\u00e1n khi kh\u00f4ng n\u00ean.<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:33.33%\">\n<figure class=\"wp-block-image size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"722\" height=\"627\" src=\"https:\/\/www.keylinktech.com\/wp-content\/uploads\/2026\/03\/AESXPS-Energy-Dispersive-Spectra-Comparison-Chart-of-GaN-and-Ga\u2082O\u2083.webp\" alt=\"\" class=\"wp-image-7712\" srcset=\"https:\/\/www.keylinktech.com\/wp-content\/uploads\/2026\/03\/AESXPS-Energy-Dispersive-Spectra-Comparison-Chart-of-GaN-and-Ga\u2082O\u2083.webp 722w, https:\/\/www.keylinktech.com\/wp-content\/uploads\/2026\/03\/AESXPS-Energy-Dispersive-Spectra-Comparison-Chart-of-GaN-and-Ga\u2082O\u2083-300x261.webp 300w, https:\/\/www.keylinktech.com\/wp-content\/uploads\/2026\/03\/AESXPS-Energy-Dispersive-Spectra-Comparison-Chart-of-GaN-and-Ga\u2082O\u2083-14x12.webp 14w, https:\/\/www.keylinktech.com\/wp-content\/uploads\/2026\/03\/AESXPS-Energy-Dispersive-Spectra-Comparison-Chart-of-GaN-and-Ga\u2082O\u2083-600x521.webp 600w\" sizes=\"(max-width: 722px) 100vw, 722px\" \/><\/figure>\n<\/div>\n<\/div>\n\n\n\n<p class=\"wp-block-paragraph\">Ga\u2082O\u2083 c\u00f3 \u0111\u1ed9 nh\u1ea1y ri\u00eang. Th\u00e0nh ph\u1ea7n h\u00f3a h\u1ecdc c\u1ee7a n\u00f3, c\u1ee5 th\u1ec3 l\u00e0 n\u1ed3ng \u0111\u1ed9 khuy\u1ebft t\u1eadt oxy, quy\u1ebft \u0111\u1ecbnh t\u00ednh ch\u1ea5t \u0111i\u1ec7n c\u1ee7a n\u00f3. Qu\u00e1 tr\u00ecnh x\u1eed l\u00fd \u1edf nhi\u1ec7t \u0111\u1ed9 cao kh\u00f4ng cho ph\u00e9p ki\u1ec3m so\u00e1t ch\u00ednh x\u00e1c \u0111i\u1ec1u \u0111\u00f3.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00f4ng ngh\u1ec7 x\u1eed l\u00fd plasma \u1edf nhi\u1ec7t \u0111\u1ed9 th\u1ea5p gi\u00fap tr\u00e1nh \u0111\u01b0\u1ee3c t\u1ea5t c\u1ea3 nh\u1eefng \u0111i\u1ec1u n\u00e0y:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>C\u00e1c th\u00e0nh ph\u1ea7n pha t\u1ea1p v\u1eabn gi\u1eef nguy\u00ean v\u1ecb tr\u00ed v\u00ec ng\u00e2n s\u00e1ch nhi\u1ec7t \u0111\u01b0\u1ee3c gi\u1eef \u1edf m\u1ee9c th\u1ea5p.<\/li>\n\n\n\n<li>C\u00e1c giao di\u1ec7n c\u1ea5u tr\u00fac d\u1ecb th\u1ec3 v\u1eabn nguy\u00ean v\u1eb9n m\u00e0 kh\u00f4ng c\u00f3 s\u1ef1 gi\u00e3n n\u1edf nhi\u1ec7t kh\u00e1c bi\u1ec7t g\u00e2y ra \u1ee9ng su\u1ea5t trong c\u00e1c l\u1edbp.<\/li>\n\n\n\n<li>C\u00e1c c\u1ea5u tr\u00fac nano v\u00e0 c\u00e1c \u0111\u1eb7c \u0111i\u1ec3m c\u00f3 t\u1ef7 l\u1ec7 chi\u1ec1u d\u00e0i\/chi\u1ec1u r\u1ed9ng cao v\u1eabn t\u1ed3n t\u1ea1i v\u00ec qu\u00e1 tr\u00ecnh n\u00e0y kh\u00f4ng c\u1ea7n nhi\u1ec7t \u0111\u1ed9 cao g\u00e2y h\u01b0 h\u1ea1i.<\/li>\n\n\n\n<li>T\u1ef7 l\u1ec7 Ga\/N tr\u00ean GaN n\u1eb1m trong ph\u1ea1m vi 1,0 \u00b1 0,04, m\u1ee9c c\u1ea7n thi\u1ebft \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o t\u00ednh ch\u1ea5t ohmic thu\u1ea7n khi\u1ebft.<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>C\u1ea3i thi\u1ec7n ti\u1ebfp x\u00fac Ohmic v\u00e0 k\u00edch ho\u1ea1t b\u1ec1 m\u1eb7t wafer<\/strong><\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">L\u00e0m s\u1ea1ch b\u1ec1 m\u1eb7t \u0111\u00fang c\u00e1ch s\u1ebd gi\u00fap c\u1ea3i thi\u1ec7n hi\u1ec7u su\u1ea5t ti\u1ebfp x\u00fac. Vi\u1ec7c c\u1ea3i thi\u1ec7n ti\u1ebfp x\u00fac ohmic \u0111\u1ebfn t\u1eeb vi\u1ec7c lo\u1ea1i b\u1ecf c\u00e1c oxit t\u1ef1 nhi\u00ean v\u00e0 c\u00e1c tr\u1ea1ng th\u00e1i b\u1ec1 m\u1eb7t bu\u1ed9c d\u00f2ng \u0111i\u1ec7n ph\u1ea3i xuy\u00ean qua c\u00e1c l\u1edbp c\u00e1ch \u0111i\u1ec7n thay v\u00ec \u0111i qua m\u1ed1i n\u1ed1i kim lo\u1ea1i-b\u00e1n d\u1eabn \u0111\u01b0\u1ee3c x\u00e1c \u0111\u1ecbnh r\u00f5 r\u00e0ng.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c k\u1ebft qu\u1ea3 ch\u00ednh t\u1eeb qu\u00e1 tr\u00ecnh chu\u1ea9n b\u1ecb b\u1ec1 m\u1eb7t b\u1eb1ng plasma:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>C\u00e1c thi\u1ebft b\u1ecb Ga\u2082O\u2083 \u0111\u01b0\u1ee3c x\u1eed l\u00fd b\u1eb1ng plasma Ar\/Cl\u2082 cho th\u1ea5y \u0111i\u1ec7n tr\u1edf ti\u1ebfp x\u00fac gi\u1ea3m h\u01a1n m\u1ed9t n\u1eeda so v\u1edbi c\u00e1c m\u1eabu ch\u01b0a \u0111\u01b0\u1ee3c x\u1eed l\u00fd.<\/li>\n\n\n\n<li>C\u00e1c transistor GaN HEMT \u0111\u01b0\u1ee3c x\u1eed l\u00fd b\u1eb1ng plasma NH\u2083 t\u1eeb xa cho th\u1ea5y d\u00f2ng \u0111i\u1ec7n \u0111\u1ea7u ra t\u0103ng t\u1eeb 20 \u0111\u1ebfn 30%, v\u1edbi s\u1ef1 c\u1ea3i thi\u1ec7n \u0111\u00e1ng k\u1ec3 v\u1ec1 hi\u1ec7n t\u01b0\u1ee3ng s\u1ee5t gi\u1ea3m d\u00f2ng \u0111i\u1ec7n v\u00e0 r\u00f2 r\u1ec9 c\u1ed5ng.<\/li>\n\n\n\n<li>C\u00e1c transistor FET Ga\u2082O\u2083 \u0111\u01b0\u1ee3c ch\u1ebf t\u1ea1o b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p ti\u1ec1n x\u1eed l\u00fd plasma Ar \u0111\u1ea1t \u0111\u01b0\u1ee3c c\u00e1c th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt hi\u1ec7u su\u1ea5t cao m\u00e0 kh\u00f4ng c\u1ea7n \u1ee7 sau khi m\u1ea1 kim lo\u1ea1i.<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\"><a href=\"https:\/\/www.keylinktech.com\/vi\/application-solutions\/activation\/\" target=\"_blank\" rel=\"noreferrer noopener\">K\u00edch ho\u1ea1t b\u1ec1 m\u1eb7t wafer<\/a> N\u00f3 c\u0169ng ki\u1ec3m so\u00e1t t\u1ec9 l\u1ec7 ph\u1ea3n \u1ee9ng h\u00f3a h\u1ecdc trong qu\u00e1 tr\u00ecnh m\u1ea1 kim lo\u1ea1i. \u0110\u1ed1i v\u1edbi vi\u1ec7c ch\u1ebf t\u1ea1o HEMT v\u00e0 \u0111i\u1ed1t r\u00e0o c\u1ea3n Schottky, \u0111\u1ed9 ch\u00ednh x\u00e1c t\u1ea1i giao di\u1ec7n th\u01b0\u1eddng l\u00e0 y\u1ebfu t\u1ed1 ph\u00e2n bi\u1ec7t c\u00e1c thi\u1ebft b\u1ecb \u0111\u1ea1t y\u00eau c\u1ea7u v\u1ec1 \u0111\u1eb7c t\u00ednh \u0111i\u1ec7n v\u1edbi c\u00e1c thi\u1ebft b\u1ecb kh\u00f4ng \u0111\u1ea1t y\u00eau c\u1ea7u.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Keylink \u00e1p d\u1ee5ng c\u00e1c nguy\u00ean t\u1eafc k\u00edch ho\u1ea1t gi\u1ed1ng nhau tr\u00ean m\u1ecdi ng\u00e0nh ngh\u1ec1. T\u00e0i li\u1ec7u c\u1ee7a ch\u00fang t\u00f4i v\u1ec1... <a href=\"https:\/\/www.keylinktech.com\/vi\/plasma-surface-technology\/process\/plasma-cleaning\/plasma-cleaning-improves-paint-adhesion-on-smartphone-housings\/\" target=\"_blank\" rel=\"noreferrer noopener\">L\u00e0m s\u1ea1ch b\u1eb1ng plasma cho l\u1edbp keo d\u00e1n v\u1ecf \u0111i\u1ec7n tho\u1ea1i th\u00f4ng minh<\/a> B\u00e0i vi\u1ebft n\u00e0y cho th\u1ea5y qu\u00e1 tr\u00ecnh k\u00edch ho\u1ea1t b\u1ec1 m\u1eb7t chuy\u1ec3n h\u00f3a th\u00e0nh c\u00e1c k\u1ebft qu\u1ea3 c\u00f3 th\u1ec3 \u0111o l\u01b0\u1eddng \u0111\u01b0\u1ee3c tr\u00ean nhi\u1ec1u lo\u1ea1i v\u1eadt li\u1ec7u kh\u00e1c nhau.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>\u0110i\u1ec1u n\u00e0y c\u00f3 \u00fd ngh\u0129a g\u00ec \u0111\u1ed1i v\u1edbi \u0111\u1ed9 tin c\u1eady l\u00e2u d\u00e0i c\u1ee7a ch\u1ea5t b\u00e1n d\u1eabn ph\u1ee9c h\u1ee3p?<\/strong><\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Vi\u1ec7c \u0111\u01b0a m\u1ed9t thi\u1ebft b\u1ecb \u0111\u1ea1t ti\u00eau chu\u1ea9n k\u1ef9 thu\u1eadt ngay t\u1eeb l\u1ea7n th\u1eed nghi\u1ec7m \u0111\u1ea7u ti\u00ean l\u00e0 m\u1ed9t chuy\u1ec7n. Gi\u1eef cho n\u00f3 \u0111\u1ea1t ti\u00eau chu\u1ea9n \u0111\u00f3 qua c\u00e1c b\u01b0\u1edbc ch\u1ebf t\u1ea1o ti\u1ebfp theo, ch\u1ecbu \u0111\u01b0\u1ee3c \u00e1p l\u1ef1c \u0111\u00f3ng g\u00f3i v\u00e0 nhi\u1ec1u n\u0103m v\u1eadn h\u00e0nh l\u1ea1i l\u00e0 chuy\u1ec7n kh\u00e1c.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c b\u1ec1 m\u1eb7t \u0111\u01b0\u1ee3c x\u1eed l\u00fd b\u1eb1ng plasma m\u1ecbn h\u01a1n v\u00e0 \u1ed5n \u0111\u1ecbnh h\u00f3a h\u1ecdc h\u01a1n so v\u1edbi c\u00e1c b\u1ec1 m\u1eb7t \u0111\u01b0\u1ee3c x\u1eed l\u00fd b\u1eb1ng nhi\u1ec7t. Ch\u00fang kh\u00f4ng ph\u00e1t sinh c\u00e1c tr\u1ea1ng th\u00e1i khuy\u1ebft t\u1eadt trong qu\u00e1 tr\u00ecnh x\u1eed l\u00fd ti\u1ebfp theo, v\u1ed1n l\u00e0m suy gi\u1ea3m d\u1ea7n hi\u1ec7u su\u1ea5t \u0111i\u1ec7n. \u0110\u1ed1i v\u1edbi c\u00e1c thi\u1ebft b\u1ecb GaN v\u00e0 Ga\u2082O\u2083 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong b\u1ed9 bi\u1ebfn t\u1ea7n \u00f4 t\u00f4, tr\u1ea1m g\u1ed1c 5G v\u00e0 chuy\u1ec3n \u0111\u1ed5i n\u0103ng l\u01b0\u1ee3ng c\u00f4ng nghi\u1ec7p, \u0111\u1ed9 tin c\u1eady c\u1ee7a ch\u1ea5t b\u00e1n d\u1eabn h\u1ee3p ch\u1ea5t theo th\u1eddi gian l\u00e0 \u0111i\u1ec1u b\u1eaft bu\u1ed9c, m\u00e0 l\u00e0 y\u00eau c\u1ea7u c\u1ea7n thi\u1ebft \u0111\u1ec3 \u0111\u1ea1t ti\u00eau chu\u1ea9n. H\u00e3y li\u00ean h\u1ec7 v\u1edbi ch\u00fang t\u00f4i \u0111\u1ec3 th\u1ea3o lu\u1eadn v\u1ec1 c\u00e1c gi\u1ea3i ph\u00e1p plasma ch\u00e2n kh\u00f4ng cho \u1ee9ng d\u1ee5ng ch\u1ea5t b\u00e1n d\u1eabn h\u1ee3p ch\u1ea5t c\u1ee7a b\u1ea1n.<\/p>\n\n\n\n<div class=\"wp-block-buttons is-content-justification-center is-layout-flex wp-container-core-buttons-is-layout-fe48e5de wp-block-buttons-is-layout-flex\">\n<div class=\"wp-block-button\"><a class=\"wp-block-button__link has-vivid-green-cyan-background-color has-background wp-element-button\" href=\"https:\/\/www.keylinktech.com\/vi\/contact\/\" target=\"_blank\" rel=\"noreferrer noopener\">Nh\u1eadn b\u00e1o gi\u00e1 mi\u1ec5n ph\u00ed<\/a><\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>Plasma cleaning semiconductor surfaces removes native oxides, carbon contamination, and dangling bonds from GaN and Ga\u2082O\u2083 at low temperatures, improving ohmic contact resistance and device reliability without the thermal damage that traditional processing causes. Why Surface Preparation Is the Bottleneck Nobody Talks About GaN and Ga\u2082O\u2083 get a lot of attention for the right reasons. [&hellip;]<\/p>\n","protected":false},"author":3,"featured_media":7711,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[95],"tags":[],"class_list":["post-7709","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-application"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v28.2 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Plasma Cleaning for GaN &amp; Ga2O3 Device Reliability | KEYLINK<\/title>\n<meta name=\"description\" content=\"Discover how plasma cleaning improves ohmic contact in GaN and Ga\u2082O\u2083 devices. 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