{"id":4250,"date":"2024-12-17T02:21:16","date_gmt":"2024-12-17T02:21:16","guid":{"rendered":"https:\/\/www.keylinktech.com\/?p=4250"},"modified":"2025-07-11T03:18:49","modified_gmt":"2025-07-11T03:18:49","slug":"outgassing-in-vacuum-chambers","status":"publish","type":"post","link":"https:\/\/www.keylinktech.com\/vi\/vaccum-plasma-surface-treatment-systems\/function\/outgassing-in-vacuum-chambers\/","title":{"rendered":"S\u1ef1 tho\u00e1t kh\u00ed trong bu\u1ed3ng ch\u00e2n kh\u00f4ng: N\u00f3 x\u1ea3y ra nh\u01b0 th\u1ebf n\u00e0o v\u00e0 t\u1ea1i sao n\u00f3 quan tr\u1ecdng"},"content":{"rendered":"<p class=\"wp-block-paragraph\">Khi kh\u00ed kh\u00f4ng mong mu\u1ed1n t\u1eeb v\u1eadt li\u1ec7u \u0111\u01b0\u1ee3c gi\u1ea3i ph\u00f3ng, hi\u1ec7n t\u01b0\u1ee3ng tho\u00e1t kh\u00ed x\u1ea3y ra. \u0110\u00e2y l\u00e0 m\u1ed9t th\u00e1ch th\u1ee9c c\u1ea3n tr\u1edf qu\u00e1 tr\u00ecnh l\u1eafng \u0111\u1ecdng ch\u00e2n kh\u00f4ng cao ho\u1eb7c qu\u00e1 tr\u00ecnh \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 ph\u1ee7 c\u00e1c l\u1edbp v\u1eadt li\u1ec7u m\u1ecfng l\u00ean b\u1ec1 m\u1eb7t v\u1eadt th\u1ec3.&nbsp;<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Trong bu\u1ed3ng ch\u00e2n kh\u00f4ng, s\u1ef1 tho\u00e1t kh\u00ed x\u1ea3y ra khi kh\u00ed b\u1ecb \u0111\u1ea9y ra kh\u1ecfi b\u1ec1 m\u1eb7t v\u1eadt th\u1ec3 trong bu\u1ed3ng \u0111\u00f3. B\u1ea1n s\u1ebd bi\u1ebft th\u00eam v\u1ec1 \u0111i\u1ec1u n\u00e0y khi \u0111\u1ecdc ti\u1ebfp, c\u00f9ng v\u1edbi:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Tho\u00e1t kh\u00ed bu\u1ed3ng ch\u00e2n kh\u00f4ng<\/li>\n\n\n\n<li>T\u1ea1i sao n\u00f3 l\u00e0 m\u1ed9t m\u1ed1i quan t\u00e2m<\/li>\n\n\n\n<li>Ngu\u1ed3n kh\u00ed th\u1ea3i<\/li>\n\n\n\n<li>C\u00e1c ph\u01b0\u01a1ng ph\u00e1p \u0111\u1ec3 gi\u1ea3m thi\u1ec3u kh\u00ed th\u1ea3i<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng x\u1eed l\u00fd plasma ch\u00e2n kh\u00f4ng c\u1ee7a KeyLink<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>T\u1ed5ng quan v\u1ec1 tho\u00e1t kh\u00ed bu\u1ed3ng ch\u00e2n kh\u00f4ng<\/strong><\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Bu\u1ed3ng ch\u00e2n kh\u00f4ng l\u00e0 c\u00e1c v\u1ecf b\u1ecdc c\u1ee9ng s\u1eed d\u1ee5ng m\u00e1y b\u01a1m ch\u00e2n kh\u00f4ng, ch\u1ecbu tr\u00e1ch nhi\u1ec7m lo\u1ea1i b\u1ecf kh\u00f4ng kh\u00ed kh\u00f4ng mong mu\u1ed1n v\u00e0 c\u00e1c lo\u1ea1i kh\u00ed kh\u00e1c. Sau \u0111\u00f3, t\u1ea1o ra m\u00f4i tr\u01b0\u1eddng \u00e1p su\u1ea5t th\u1ea5p ho\u1eb7c \u0111\u01a1n gi\u1ea3n l\u00e0 ch\u00e2n kh\u00f4ng.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u0110\u1ec3 t\u1ea1o ra c\u00e1c bu\u1ed3ng ch\u00e2n kh\u00f4ng ho\u1eb7c ph\u00f2ng ch\u00e2n kh\u00f4ng, b\u1ea1n ph\u1ea3i c\u00f3 m\u1ed9t l\u1edbp v\u1ecf \u0111\u01b0\u1ee3c x\u00e2y d\u1ef1ng t\u1eeb c\u00e1c v\u1eadt li\u1ec7u r\u1eafn nh\u01b0 th\u00e9p kh\u00f4ng g\u1ec9 v\u00e0 c\u00e1c m\u00e1y b\u01a1m g\u1eafn v\u00e0o bu\u1ed3ng, \u0111\u1ec3 kh\u00f4ng kh\u00ed b\u00ean trong bu\u1ed3ng n\u00e0y \u0111\u01b0\u1ee3c b\u01a1m ra ngo\u00e0i.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Bu\u1ed3ng ch\u00e2n kh\u00f4ng t\u01b0\u01a1ng th\u00edch v\u1edbi nhi\u1ec1u \u1ee9ng d\u1ee5ng c\u00f4ng nghi\u1ec7p kh\u00e1c nhau bao g\u1ed3m s\u1ea3n xu\u1ea5t, nghi\u00ean c\u1ee9u, th\u1eed nghi\u1ec7m ch\u1ea5t l\u01b0\u1ee3ng, th\u1ef1c ph\u1ea9m v\u00e0 nhi\u1ec1u l\u0129nh v\u1ef1c c\u00f4ng nghi\u1ec7p kh\u00e1c.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">V\u1eady, tho\u00e1t kh\u00ed trong ch\u00e2n kh\u00f4ng l\u00e0 g\u00ec? Tho\u00e1t kh\u00ed trong bu\u1ed3ng ch\u00e2n kh\u00f4ng x\u1ea3y ra khi c\u00e1c kh\u00ed tr\u01b0\u1edbc \u0111\u00f3 b\u1ecb gi\u1eef l\u1ea1i trong v\u1eadt li\u1ec7u \u0111\u01b0\u1ee3c gi\u1ea3i ph\u00f3ng khi ti\u1ebfp x\u00fac v\u1edbi \u00e1p su\u1ea5t th\u1ea5p. \u0110i\u1ec1u n\u00e0y x\u1ea3y ra do nhi\u1ec1u c\u01a1 ch\u1ebf kh\u00e1c nhau, t\u1eeb gi\u1ea3i h\u1ea5p \u0111\u1ebfn th\u1ea9m th\u1ea5u, thay \u0111\u1ed5i theo \u1ea3nh h\u01b0\u1edfng c\u1ee7a nhi\u1ec7t \u0111\u1ed9 v\u00e0 \u00e1p su\u1ea5t.&nbsp;<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Kh\u00ed th\u1ea3i \u0111\u01b0a ch\u1ea5t g\u00e2y \u00f4 nhi\u1ec5m v\u00e0o bu\u1ed3ng ch\u00e2n kh\u00f4ng c\u1ee7a b\u1ea1n, r\u00f5 r\u00e0ng \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn ho\u1ea1t \u0111\u1ed9ng tr\u01a1n tru trong doanh nghi\u1ec7p c\u1ee7a b\u1ea1n. S\u1ef1 hi\u1ec7n di\u1ec7n c\u1ee7a v\u1eadt li\u1ec7u c\u00f3 t\u1ef7 l\u1ec7 kh\u00ed th\u1ea3i th\u1ea5p l\u00e0 c\u1ea7n thi\u1ebft \u0111\u1ec3 gi\u1ea3i quy\u1ebft ngay t\u00ecnh tr\u1ea1ng kh\u00ed th\u1ea3i. B\u1ea1n c\u0169ng ph\u1ea3i ti\u1ebfn h\u00e0nh th\u1eed nghi\u1ec7m nghi\u00eam ng\u1eb7t \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o m\u1ecdi th\u1ee9 tu\u00e2n th\u1ee7 c\u00e1c ti\u00eau chu\u1ea9n c\u1ee7a ng\u00e0nh.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>Tho\u00e1t kh\u00ed so v\u1edbi Tho\u00e1t kh\u00ed<\/strong><\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">M\u1eb7c d\u00f9 c\u1ea3 qu\u00e1 tr\u00ecnh tho\u00e1t kh\u00ed v\u00e0 h\u1ea5p th\u1ee5 kh\u00ed \u0111\u1ec1u li\u00ean quan \u0111\u1ebfn vi\u1ec7c gi\u1ea3i ph\u00f3ng kh\u00ed t\u1eeb v\u1eadt li\u1ec7u c\u1ee7a b\u1ea1n, nh\u01b0ng \u0111i\u1ec3m kh\u00e1c bi\u1ec7t chung c\u1ee7a ch\u00fang l\u00e0 ch\u00fang x\u1ea3y ra trong nh\u1eefng \u0111i\u1ec1u ki\u1ec7n ho\u00e0n to\u00e0n kh\u00e1c nhau.&nbsp;<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Lo\u1ea1i tr\u01b0\u1edbc th\u01b0\u1eddng li\u00ean quan \u0111\u1ebfn vi\u1ec7c gi\u1ea3i ph\u00f3ng kh\u00ed trong m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng ho\u1eb7c m\u00f4i tr\u01b0\u1eddng c\u00f3 nhi\u1ec7t \u0111\u1ed9 cao. V\u00ed d\u1ee5, trong ng\u00e0nh h\u00e0ng kh\u00f4ng v\u0169 tr\u1ee5.&nbsp;<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">M\u1eb7t kh\u00e1c, qu\u00e1 tr\u00ecnh tho\u00e1t kh\u00ed sau x\u1ea3y ra \u1edf nhi\u1ec7t \u0111\u1ed9 ph\u00f2ng v\u00e0 th\u01b0\u1eddng l\u00e0 c\u00e1c v\u1ea5n \u0111\u1ec1 v\u1ec1 kh\u00ed quy\u1ec3n b\u00ecnh th\u01b0\u1eddng. Thu\u1eadt ng\u1eef n\u00e0y \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 li\u00ean k\u1ebft v\u1edbi c\u00e1c v\u1ea5n \u0111\u1ec1 v\u1ec1 ch\u1ea5t l\u01b0\u1ee3ng kh\u00f4ng kh\u00ed trong nh\u00e0 t\u1eeb c\u00e1c v\u1eadt d\u1ee5ng gia \u0111\u00ecnh nh\u01b0 s\u01a1n v\u00e0 \u0111\u1ed3 n\u1ed9i th\u1ea5t, gi\u1ea3i ph\u00f3ng c\u00e1c nguy\u00ean t\u1ed1, ch\u1eb3ng h\u1ea1n nh\u01b0 h\u1ee3p ch\u1ea5t h\u1eefu c\u01a1 d\u1ec5 bay h\u01a1i c\u00f3 th\u1ec3 g\u00e2y h\u1ea1i cho s\u1ee9c kh\u1ecfe c\u1ee7a b\u1ea1n.&nbsp;<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>Tho\u00e1t kh\u00ed so v\u1edbi tho\u00e1t kh\u00ed<\/strong><\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">S\u1ef1 kh\u00e1c bi\u1ec7t c\u1ee7a ch\u00fang n\u1eb1m \u1edf tr\u1ecdng t\u00e2m v\u00e0 \u1ee9ng d\u1ee5ng. Trong khi qu\u00e1 tr\u00ecnh tho\u00e1t kh\u00ed l\u00e0 qu\u00e1 tr\u00ecnh gi\u1ea3i ph\u00f3ng kh\u00ed t\u1eeb v\u1eadt li\u1ec7u r\u1eafn trong h\u1ec7 th\u1ed1ng ch\u00e2n kh\u00f4ng, \u0111\u1ec3 lo\u1ea1i b\u1ecf c\u00e1c ch\u1ea5t c\u00f3 h\u1ea1i, ch\u1eb3ng h\u1ea1n nh\u01b0 trong s\u1ea3n xu\u1ea5t \u0111\u1ed3 \u0111i\u1ec7n t\u1eed, qu\u00e1 tr\u00ecnh kh\u1eed kh\u00ed lo\u1ea1i b\u1ecf kh\u00ed h\u00f2a tan kh\u1ecfi ch\u1ea5t l\u1ecfng, kh\u00f4ng ph\u1ea3i ch\u1ea5t r\u1eafn. \u0110i\u1ec1u n\u00e0y sau \u0111\u00f3 n\u00e2ng cao ch\u1ea5t l\u01b0\u1ee3ng s\u1ea3n ph\u1ea9m, \u0111\u1eb7c bi\u1ec7t l\u00e0 trong ng\u00e0nh th\u1ef1c ph\u1ea9m v\u00e0 d\u01b0\u1ee3c ph\u1ea9m.&nbsp;<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">C\u1ea3 qu\u00e1 tr\u00ecnh kh\u1eed kh\u00ed v\u00e0 th\u1ea3i kh\u00ed \u0111\u1ec1u c\u1ea7n thi\u1ebft \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o t\u00ednh to\u00e0n v\u1eb9n v\u00e0 an to\u00e0n c\u1ee7a v\u1eadt li\u1ec7u, nh\u01b0ng m\u1ed7i qu\u00e1 tr\u00ecnh ho\u1ea1t \u0111\u1ed9ng trong nh\u1eefng \u0111i\u1ec1u ki\u1ec7n ri\u00eang bi\u1ec7t.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>T\u1ea1i sao n\u00f3 l\u00e0 m\u1ed9t m\u1ed1i quan t\u00e2m<\/strong><\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00f3 m\u1ed9t s\u1ed1 l\u00fd do khi\u1ebfn hi\u1ec7n t\u01b0\u1ee3ng tho\u00e1t kh\u00ed trong bu\u1ed3ng ch\u00e2n kh\u00f4ng tr\u1edf th\u00e0nh m\u1ed1i quan t\u00e2m ch\u00ednh:&nbsp;<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>S\u1ef1 \u00f4 nhi\u1ec5m<\/strong><\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Vi\u1ec7c gi\u1ea3i ph\u00f3ng kh\u00ed kh\u00f4ng mong mu\u1ed1n, c\u0169ng nh\u01b0 c\u00e1c ch\u1ea5t d\u1ec5 bay h\u01a1i kh\u00e1c, g\u00e2y \u00f4 nhi\u1ec5m cho m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng. \u0110i\u1ec1u n\u00e0y c\u00f3 th\u1ec3 \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn hi\u1ec7u su\u1ea5t t\u1ed1t c\u1ee7a thi\u1ebft b\u1ecb nh\u1ea1y c\u1ea3m. N\u00f3 c\u00f3 th\u1ec3 th\u00e1ch th\u1ee9c c\u00e1c ng\u00e0nh s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn, quang h\u1ecdc ho\u1eb7c m\u00f4 ph\u1ecfng kh\u00f4ng gian.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>Thay \u0111\u1ed5i \u00e1p su\u1ea5t<\/strong><\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Ngo\u00e0i vi\u1ec7c g\u00e2y \u00f4 nhi\u1ec5m kh\u00f3 ch\u1ecbu, kh\u00ed tho\u00e1t ra c\u0169ng c\u00f3 xu h\u01b0\u1edbng l\u00e0m t\u0103ng \u00e1p su\u1ea5t b\u00ean trong bu\u1ed3ng ch\u00e2n kh\u00f4ng. \u0110i\u1ec1u n\u00e0y c\u00f3 th\u1ec3 l\u00e0m gi\u00e1n \u0111o\u1ea1n ho\u1ea1t \u0111\u1ed9ng c\u1ee7a c\u00e1c thi\u1ebft b\u1ecb v\u00e0 d\u1ee5ng c\u1ee5 c\u1ee7a b\u1ea1n ph\u1ee5 thu\u1ed9c v\u00e0o m\u1ed9t s\u1ed1 ph\u1ea1m vi \u00e1p su\u1ea5t nh\u1ea5t \u0111\u1ecbnh.&nbsp;<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>S\u1ef1 suy tho\u00e1i ch\u00e2n kh\u00f4ng<\/strong><\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">V\u00ec qu\u00e1 tr\u00ecnh tho\u00e1t kh\u00ed c\u0169ng c\u00f3 th\u1ec3 \u0111\u01b0a th\u00eam kh\u00ed v\u00e0o bu\u1ed3ng, \u0111\u1ed9 tinh khi\u1ebft c\u1ee7a ch\u00e2n kh\u00f4ng b\u1ecb gi\u1ea3m. \u0110i\u1ec1u n\u00e0y l\u00e0m gi\u1ea3m hi\u1ec7u qu\u1ea3 c\u1ee7a c\u00e1c quy tr\u00ecnh ph\u1ee5 thu\u1ed9c v\u00e0o ch\u00e2n kh\u00f4ng ch\u1ea5t l\u01b0\u1ee3ng cao, ch\u1eb3ng h\u1ea1n nh\u01b0 s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn v\u00e0 k\u00ednh hi\u1ec3n vi \u0111i\u1ec7n t\u1eed. C\u00e1c kh\u00ed tho\u00e1t kh\u00ed c\u0169ng c\u00f3 th\u1ec3 t\u01b0\u01a1ng t\u00e1c v\u1edbi c\u00e1c v\u1eadt li\u1ec7u kh\u00e1c b\u00ean trong bu\u1ed3ng v\u00e0o th\u1eddi \u0111i\u1ec3m kh\u00f4ng mong mu\u1ed1n, d\u1eabn \u0111\u1ebfn ph\u1ea3n \u1ee9ng h\u00f3a h\u1ecdc v\u00e0 c\u00e1c t\u00e1c d\u1ee5ng ph\u1ee5 kh\u00f4ng mong mu\u1ed1n kh\u00e1c.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>Ngu\u1ed3n kh\u00ed th\u1ea3i<\/strong><\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00f3 b\u1ed1n ngu\u1ed3n n\u1ed5i b\u1eadt c\u1ee7a hi\u1ec7n t\u01b0\u1ee3ng n\u00e0y:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>S\u1ef1 bay h\u01a1i: C\u00e1c ph\u00e2n t\u1eed v\u1eadt ch\u1ea5t tho\u00e1t ra kh\u1ecfi b\u1ec1 m\u1eb7t c\u1ee7a ch\u00fang.<\/li>\n\n\n\n<li>Gi\u1ea3i h\u1ea5p: C\u00e1c ph\u00e2n t\u1eed kh\u00ed \u0111\u00e3 \u0111\u01b0\u1ee3c h\u1ea5p th\u1ee5 tr\u00ean b\u1ec1 m\u1eb7t \u0111\u01b0\u1ee3c gi\u1ea3i ph\u00f3ng do nhi\u1ec7t, \u0111i\u1ec7n ho\u1eb7c k\u00edch th\u00edch t\u1ed1i \u01b0u.<\/li>\n\n\n\n<li>S\u1ef1 khu\u1ebfch t\u00e1n: C\u00e1c ph\u00e2n t\u1eed kh\u00ed tho\u00e1t ra t\u1eeb h\u1ea7u h\u1ebft c\u00e1c ph\u1ea7n c\u1ee7a v\u1eadt li\u1ec7u.&nbsp;<\/li>\n\n\n\n<li>S\u1ef1 th\u1ea9m th\u1ea5u: C\u00e1c nguy\u00ean t\u1eed kh\u00f4ng kh\u00ed t\u1eeb b\u00ean ngo\u00e0i bu\u1ed3ng ch\u00e2n kh\u00f4ng \u0111i v\u00e0o b\u00ean trong bu\u1ed3ng ch\u00e2n kh\u00f4ng.&nbsp;<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>C\u00e1c ph\u01b0\u01a1ng ph\u00e1p \u0111\u00e3 \u0111\u01b0\u1ee3c ch\u1ee9ng minh \u0111\u1ec3 gi\u1ea3m s\u1ef1 tho\u00e1t kh\u00ed<\/strong><\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">May m\u1eafn thay, c\u00f3 nh\u1eefng c\u00e1ch b\u1ea1n c\u00f3 th\u1ec3 th\u1ef1c hi\u1ec7n \u0111\u1ec3 gi\u1ea3m thi\u1ec3u kh\u00ed th\u1ea3i v\u00e0 c\u00e1c t\u00e1c \u0111\u1ed9ng x\u1ea5u c\u1ee7a n\u00f3. H\u00e3y c\u00f9ng t\u00ecm hi\u1ec3u c\u00e1c c\u00e1ch ti\u1ebfp c\u1eadn n\u00e0y th\u00f4ng qua bi\u1ec3u \u0111\u1ed3 n\u00e0y:<\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><tbody><tr><td><strong>Ti\u1ebfp c\u1eadn<\/strong><\/td><td><strong>V\u1eadt li\u1ec7u&nbsp;<\/strong><\/td><td><strong>\u1ee8ng d\u1ee5ng<\/strong><\/td><td><strong>Kh\u00f4ng hi\u1ec7u qu\u1ea3 \u0111\u1ed1i v\u1edbi:<\/strong><\/td><td><strong>M\u1ee9c ch\u00e2n kh\u00f4ng<\/strong><\/td><td><strong>Kho\u1ea3ng th\u1eddi gian<\/strong><\/td><\/tr><tr><td><strong>L\u1edbp ph\u1ee7 ho\u1ea1t \u0111\u1ed9ng<\/strong><\/td><td>Hafni, Zirconi, Titan, Paladi, Vanadi v\u00e0 c\u00e1c k\u1ebft h\u1ee3p<\/td><td>H2, H2O, CO, O2, N2 v\u00e0 kh\u00f4ng gian nh\u1ecf<\/td><td>Hydrocarbon, kh\u00ed tr\u01a1 v\u00e0 ho\u1ea1t \u0111\u1ed9ng li\u00ean t\u1ee5c<\/td><td>Gi\u1ea3m kh\u00ed tho\u00e1t ra xu\u1ed1ng &lt;10\u221213 m\u00e0 kh\u00f4ng c\u1ea7n n\u01b0\u1edbng<\/td><td>D\u1ef1a tr\u00ean k\u00edch th\u01b0\u1edbc<\/td><\/tr><tr><td><strong>N\u01b0\u1edbng b\u1eb1ng kh\u00f4ng kh\u00ed<\/strong><\/td><td>Kh\u00f4ng kh\u00ed<\/td><td>H2, CO, CO2, CH4, th\u00e9p kh\u00f4ng g\u1ec9 v\u00e0 nh\u00f4m<\/td><td>M\u1ea1 cadmium, nh\u1ef1a v\u00e0 c\u00e1c th\u00e0nh ph\u1ea7n nh\u1ea1y c\u1ea3m v\u1edbi nhi\u1ec7t \u0111\u1ed9<\/td><td>Gi\u1ea3m s\u1ef1 tho\u00e1t kh\u00ed c\u1ee7a H2 xu\u1ed1ng &lt;10\u221214<\/td><td>Hai \u0111\u1ebfn 400 gi\u1edd<\/td><\/tr><tr><td><strong>Th\u1ed5i<\/strong><\/td><td>Kh\u00f4ng kh\u00ed, nit\u01a1 ho\u1eb7c kh\u00ed tr\u01a1 kh\u00f4 kh\u00e1c<\/td><td>C\u00e1c ch\u1ea5t g\u00e2y \u00f4 nhi\u1ec5m th\u00f4 ho\u1eb7c m\u1ecbn, c\u1ed9ng v\u1edbi c\u00e1c ph\u00e2n t\u1eed n\u1eb7ng li\u00ean k\u1ebft l\u1ecfng l\u1ebbo<\/td><td>m\u1ee1<\/td><td><\/td><td>&lt; 30 ph\u00fat<\/td><\/tr><tr><td><strong>X\u1eed l\u00fd h\u00f3a h\u1ecdc<\/strong><\/td><td>H2O, HCl, HNO3 ho\u1eb7c HF<\/td><td>B\u1ec1 m\u1eb7t g\u1ed3 gh\u1ec1<\/td><td>Gi\u1ea3m d\u1ea7n theo c\u1ea5p \u0111\u1ed9 v\u1ec1 t\u1ed1c \u0111\u1ed9 tho\u00e1t kh\u00ed<\/td><td><\/td><td>&lt; 30 ph\u00fat<\/td><\/tr><tr><td><strong>Ph\u00f3ng \u0111i\u1ec7n ph\u00e1t s\u00e1ng<\/strong><\/td><td>Ar\/5-10%O2, Ar, O2, N2 v\u00e0 H2<\/td><td>C\u00e1c ph\u00e2n t\u1eed g\u1ed1c C ho\u1eb7c O, di\u1ec7n t\u00edch b\u1ec1 m\u1eb7t l\u1edbn v\u00e0 ph\u1ee5c h\u1ed3i sau khi ti\u1ebfp x\u00fac v\u1edbi kh\u00ed quy\u1ec3n<\/td><td>C\u00e1c th\u00e0nh ph\u1ea7n l\u1edbn<\/td><td>Gi\u1ea3m t\u1ef7 l\u1ec7 tho\u00e1t kh\u00ed 13 l\u1ea7n<\/td><td>Kho\u1ea3ng hai gi\u1edd<\/td><\/tr><tr><td><strong>L\u1edbp ph\u1ee7 th\u1ee5 \u0111\u1ed9ng<\/strong><\/td><td>Si, TiN, BN, Al2O3 v\u00e0 ZrO3<\/td><td>H2 t\u1eeb kim lo\u1ea1i, CO, CO2 v\u00e0 H2O<\/td><td><\/td><td>Gi\u1ea3m l\u01b0\u1ee3ng kh\u00ed tho\u00e1t ra c\u1ee7a H2 t\u1eeb 0,1 \u0111\u1ebfn 100 l\u1ea7n<\/td><td>D\u1ef1a tr\u00ean k\u00edch th\u01b0\u1edbc<\/td><\/tr><tr><td><strong>Kh\u00ed ph\u1ea3n \u1ee9ng<\/strong><\/td><td>O2 ho\u1eb7c NO \u0111\u1ec3 oxy h\u00f3a v\u00e0 H2 ho\u1eb7c NH3 \u0111\u1ec3 kh\u1eed<\/td><td>Hi\u0111rocacbon<\/td><td>C\u00f3 th\u1ec3 t\u1ea1o th\u00e0nh oxit kh\u00f4ng mong mu\u1ed1n<\/td><td>Gi\u1ea3m t\u1ef7 l\u1ec7 tho\u00e1t kh\u00ed xu\u1ed1ng 50 ph\u1ea7n tr\u0103m<\/td><td>30 ph\u00fat \u0111\u1ebfn hai gi\u1edd<\/td><\/tr><tr><td><strong>N\u01b0\u1edbng ch\u00e2n kh\u00f4ng<\/strong><\/td><td><\/td><td>H20, kim lo\u1ea1i v\u00e0 UHV<\/td><td>C\u00e1c th\u00e0nh ph\u1ea7n nh\u1ea1y c\u1ea3m v\u1edbi nhi\u1ec7t \u0111\u1ed9<\/td><td>Gi\u1ea3m kh\u00ed tho\u00e1t ra H2 xu\u1ed1ng &lt;10 \u0111\u1ebfn 14<\/td><td>Hai \u0111\u1ebfn 400 gi\u1edd<\/td><\/tr><tr><td><strong>T\u1ea9y d\u1ea7u m\u1ee1 b\u1eb1ng h\u01a1i<\/strong><\/td><td>Dung m\u00f4i \u0111un n\u00f3ng<\/td><td>C\u00e1c ch\u1ea5t g\u00e2y \u00f4 nhi\u1ec5m th\u00f4 ho\u1eb7c m\u1ecbn v\u00e0 c\u00e1c ph\u00e2n t\u1eed n\u1eb7ng li\u00ean k\u1ebft l\u1ecfng l\u1ebbo<\/td><td>Khu v\u1ef1c r\u1ed9ng l\u1edbn v\u00e0 kh\u00f4ng th\u1ec3 ti\u1ebfp c\u1eadn<\/td><td>Gi\u1ea3m d\u1ea7n v\u1ec1 m\u1eb7t \u0111\u1ed9 l\u1edbn trong qu\u00e1 tr\u00ecnh tho\u00e1t kh\u00ed<\/td><td>\u00cdt h\u01a1n m\u1ed9t gi\u1edd<\/td><\/tr><tr><td><strong>R\u1eeda<\/strong><\/td><td>N\u01b0\u1edbc n\u00f3ng ho\u1eb7c dung m\u00f4i v\u00e0 ch\u1ea5t t\u1ea9y r\u1eeda<\/td><td>Ch\u1ea5t g\u00e2y \u00f4 nhi\u1ec5m th\u00f4 ho\u1eb7c m\u1ecbn<\/td><td>m\u1ee1&nbsp;<\/td><td>\u00c1p su\u1ea5t &gt;10<sup>-3<\/sup>mbar<\/td><td>\u00cdt h\u01a1n 30 ph\u00fat<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>Ph\u1ea7n k\u1ebft lu\u1eadn<\/strong><\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Tho\u00e1t kh\u00ed kh\u00f4ng ph\u1ea3i l\u00e0 \u0111i\u1ec1u b\u1ea1n mu\u1ed1n g\u1eb7p ph\u1ea3i n\u1ebfu b\u1ea1n mu\u1ed1n ng\u00e0nh c\u00f4ng nghi\u1ec7p c\u1ee7a m\u00ecnh ti\u1ebfp t\u1ee5c ho\u1ea1t \u0111\u1ed9ng tr\u01a1n tru. \u0110\u00f3 l\u00e0 s\u1ef1 gi\u1ea3i ph\u00f3ng kh\u00ed kh\u00f4ng mong mu\u1ed1n v\u00e0 c\u1ea3n tr\u1edf c\u00f3 th\u1ec3 ch\u1ee7 y\u1ebfu \u0111\u01b0a ch\u1ea5t g\u00e2y \u00f4 nhi\u1ec5m v\u00e0o bu\u1ed3ng ch\u00e2n kh\u00f4ng c\u1ee7a b\u1ea1n. Tuy nhi\u00ean, c\u00f3 nh\u1eefng ph\u01b0\u01a1ng ph\u00e1p b\u1ea1n c\u00f3 th\u1ec3 th\u1ef1c hi\u1ec7n \u0111\u1ec3 gi\u1ea3i quy\u1ebft v\u1ea5n \u0111\u1ec1 n\u00e0y, ch\u1eb3ng h\u1ea1n nh\u01b0 r\u1eeda, x\u1eed l\u00fd h\u00f3a ch\u1ea5t v\u00e0 ph\u00f3ng \u0111i\u1ec7n ph\u00e1t s\u00e1ng, trong s\u1ed1 nhi\u1ec1u ph\u01b0\u01a1ng ph\u00e1p kh\u00e1c.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">M\u1ed9t ph\u01b0\u01a1ng ph\u00e1p hi\u1ec7u qu\u1ea3 kh\u00e1c \u0111\u1ec3 gi\u1ea3i quy\u1ebft v\u1ea5n \u0111\u1ec1 n\u00e0y l\u00e0 s\u1eed d\u1ee5ng h\u1ec7 th\u1ed1ng x\u1eed l\u00fd plasma ch\u00e2n kh\u00f4ng, ch\u1eb3ng h\u1ea1n nh\u01b0 h\u1ec7 th\u1ed1ng c\u1ee7a KeyLink. Thi\u1ebft b\u1ecb hi\u1ec7n \u0111\u1ea1i c\u1ee7a th\u01b0\u01a1ng hi\u1ec7u n\u00e0y kh\u00f4ng ch\u1ec9 gi\u1ea3i quy\u1ebft t\u00ecnh tr\u1ea1ng \u00f4 nhi\u1ec5m m\u00e0 c\u00f2n h\u01b0\u1edbng \u0111\u1ebfn vi\u1ec7c k\u00edch ho\u1ea1t b\u1ec1 m\u1eb7t, kh\u1eafc b\u1ec1 m\u1eb7t v\u00e0 t\u0103ng c\u01b0\u1eddng kh\u1ea3 n\u0103ng th\u1ea5m \u01b0\u1edbt. T\u00ecm hi\u1ec3u <a href=\"https:\/\/www.keylinktech.com\/vi\/contact\/\">l\u00e0m th\u1ebf n\u00e0o b\u1ea1n c\u00f3 th\u1ec3 c\u00f3 \u0111\u01b0\u1ee3c c\u00f4ng ngh\u1ec7 n\u00e0y<\/a> b\u1eb1ng c\u00e1ch k\u1ebft n\u1ed1i v\u1edbi nh\u00f3m c\u1ee7a h\u1ecd ngay h\u00f4m nay.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>","protected":false},"excerpt":{"rendered":"<p>When unwanted gas from a material gets released, outgassing occurs. This is a challenge that hinders high vacuum deposition, or the process utilized to apply thin layers of material to an object\u2019s surface.&nbsp; In a vacuum chamber, outgassing happens when gases become expelled from object surfaces in that chamber. More on this as you read [&hellip;]<\/p>\n","protected":false},"author":3,"featured_media":4284,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[119],"tags":[],"class_list":["post-4250","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-function"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v28.2 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Vacuum Chamber Outgassing: Causes and Solutions<\/title>\n<meta name=\"description\" content=\"KeyLink Tech&#039;s guide on outgassing in vacuum chambers. See why it matters and how to manage it effectively. Click to learn more.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.keylinktech.com\/vi\/vaccum-plasma-surface-treatment-systems\/function\/outgassing-in-vacuum-chambers\/\" \/>\n<meta property=\"og:locale\" content=\"vi_VN\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Vacuum Chamber Outgassing: Causes and Solutions\" \/>\n<meta property=\"og:description\" content=\"KeyLink Tech&#039;s guide on outgassing in vacuum chambers. See why it matters and how to manage it effectively. 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